FOUP Stocker is an automated storage warehouse for semiconductor factories with multi-layer storage space, which is mainly used for automated transfer and storage of FOUP in semiconductor factories to realize the flow of wafers between processes.
Product Range | FOUP, FOSB, Megazine, Tray, Cassette |
Rated Load | Max20Kg |
Motion Control | X-axis, Z-axis, R-axis, fork telescoping axis |
Movement Speed | X-axis 120m/min, Z-axis 120m/min |
Fork Cycle | 2sec |
Clean Environment | Class 100 - Class 1000 |